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1

Effect of Process Gases on Fabricating Tapered Through-Silicon vias by Continuous SF6/O2/Ar Plasma Etching

Dixit, P., Vahanen, S., Salonen, J., Monnoyer, P.

Journal:

ECS Journal of Solid State Science and Technology

Year:

2012

Language:

english

File:

PDF, 2.48 MB

english, 2012

2

Advanced processing of CdTe pixel radiation detectors

Gädda, A., Winkler, A., Ott, J., Härkönen, J., Karadzhinova-Ferrer, A., Koponen, P., Luukka, P., Tikkanen, J., Vähänen, S.

Journal:

Journal of Instrumentation

Year:

2017

Language:

english

File:

PDF, 1.95 MB

english, 2017

3

Progress in the understanding of the long-term corrosion behaviour of copper canisters

King, Fraser, Lilja, Christina, Vähänen, Marjut

Journal:

Journal of Nuclear Materials

Year:

2013

Language:

english

File:

PDF, 849 KB

english, 2013

4

[IEEE 2012 7th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT) - Taipei, Taiwan (2012.10.24-2012.10.26)] 2012 7th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT) - Role of process gases in making tapered through-silicon vias for 3D MEMS packaging

Dixit, Pradeep, Vahanen, Sami, Salonen, Jaakko, Monnoyer, Philippe

Year:

2012

Language:

english

File:

PDF, 12.18 MB

english, 2012

5

Low-cost bump bonding activities at CERN

Vähänen, S, Tick, T, Campbell, M

Journal:

Journal of Instrumentation

Year:

2010

File:

PDF, 922 KB

2010

6

Edge pixel response studies of edgeless silicon sensor technology for pixellated imaging detectors

Maneuski, D., Bates, R., Blue, A., Buttar, C., Doonan, K., Eklund, L., Gimenez, E.N., Hynds, D., Kachkanov, S., Kalliopuska, J., McMullen, T., O'Shea, V., Tartoni, N., Plackett, R., Vahanen, S., Wraig

Journal:

Journal of Instrumentation

Year:

2015

Language:

english

File:

PDF, 3.70 MB

english, 2015

7

Thin hybrid pixel assembly fabrication development with backside compensation layer

Bates, R., Buttar, C., McMullen, T., Cunningham, L., Ashby, J., Doherty, F., Pares, G., Vignoud, L., Kholti, B., Vahanen, S.

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

2016

Language:

english

File:

PDF, 794 KB

english, 2016

8

[IEEE 2011 IEEE Nuclear Science Symposium and Medical Imaging Conference (2011 NSS/MIC) - Valencia, Spain (2011.10.23-2011.10.29)] 2011 IEEE Nuclear Science Symposium Conference Record - Low-temperature bump bonding of Timepix readout chips and CdTe sensors at Different Sensor pitches

Heikkinen, Hannele, Gadda, Akiko, Vahanen, Sami, Salonen, Jaakko, Monnoyer, Philippe, Blaj, Gabriel, Tlustos, Lukas, Campbell, Michael

Year:

2011

Language:

english

File:

PDF, 3.36 MB

english, 2011

9

Rework of flip chip bonded radiation pixel detectors

S. Vähänen, H. Heikkinen, H. Pohjonen, J. Salonen, S. Savolainen-Pulli

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

2008

Language:

english

File:

PDF, 412 KB

english, 2008

10

[IEEE 2012 4th Electronic System-Integration Technology Conference (ESTC) - Amsterdam, Netherlands (2012.09.17-2012.09.20)] 2012 4th Electronic System-Integration Technology Conference - Analysis of microstructural evolution in SLID-bonding used for hermetic encapsulation of MEMS devices

Vuorinen, V., Dong, H., Xu, H., Vahanen, S., Suni, T., Laurila, T., Paulasto-Krockel, M.

Year:

2012

Language:

english

File:

PDF, 825 KB

english, 2012

11

Experimental studies of the interactions between anaerobically corroding iron and bentonite

Liisa Carlson, Ola Karnland, Virginia M. Oversby, Andy P. Rance, Nick R. Smart, Margit Snellman, Marjut Vähänen, Lars O. Werme

Journal:

Physics and Chemistry of the Earth, Parts A/B/C

Year:

2007

Language:

english

File:

PDF, 781 KB

english, 2007

12

Impact of restoration measures on a northern forest lake, Finland

Vähänen, K., Halmeenpää, H., Tertsunen, J., Väisänen, T., Yrjänä, T.

Journal:

SIL Proceedings, 1922-2010

Year:

2006

File:

PDF, 1.40 MB

2006

13

Fabrication and electrical characterization of high aspect ratio poly-silicon filled through-silicon vias

Dixit, Pradeep, Vehmas, Tapani, Vähänen, Sami, Monnoyer, Philippe, Henttinen, Kimmo

Journal:

Journal of Micromechanics and Microengineering

Year:

2012

Language:

english

File:

PDF, 2.41 MB

english, 2012

14

Impact of restoration measures on a northern forest lake, Finland

Vähänen, K., Halmeenpää, H., Tertsunen, J., Väisänen, T., Yrjänä, T.

Journal:

SIL Proceedings, 1922-2010

Year:

2006

Language:

english

File:

PDF, 1.40 MB

english, 2006

15

[IEEE IEEE Symposium Conference Record Nuclear Science 2004. - Rome, Italy (16-22 Oct. 2004)] IEEE Symposium Conference Record Nuclear Science 2004. - A Fine Pitch Bump Bonding Process compatible with the Manufacture of the Pixel-HPD~s for the LHCb RICH Detector

Campbell, M., Aglieri-Rinella, G., Arnau-Izquierdo, G., Gys, T., Kanaya, N., Newby, C., Piedigrossi, D., Riedler, P., Salmi, J., Salonen, J., Savolainen-Pulli, S., Somerville, L., Suni, I., Vahanen, S

Year:

2004

Language:

english

File:

PDF, 2.00 MB

english, 2004

16

Experiences in flip chip production of radiation detectors

Satu Savolainen-Pulli, Jaakko Salonen, Jorma Salmi, Sami Vähänen

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

2006

Language:

english

File:

PDF, 325 KB

english, 2006

17

A Fine Pitch Bump Bonding Process Compatible With the Manufacture of the Pixel-HPD's for the LHCb RICH Detector

Campbell, M., Rinella, G.A., Izquierdo, G.A., Gys, T., Kanaya, N., Newby, C., Piedigrossi, D., Riedler, P., Salmi, J., Salonen, J., Sav, S., Somerville, L., Suni, I., Vahanen, S., Wyllie, K.

Journal:

IEEE Transactions on Nuclear Science

Year:

2006

Language:

english

File:

PDF, 3.50 MB

english, 2006

18

[IEEE 2011 IEEE Nuclear Science Symposium and Medical Imaging Conference (2011 NSS/MIC) - Valencia, Spain (2011.10.23-2011.10.29)] 2011 IEEE Nuclear Science Symposium Conference Record - The influence of edge effects on the detection properties of cadmium telluride

Bosma, Marten, van Beuzekom, Martin, Vahanen, Sami, Visser, Jan, Koffeman, Els

Year:

2011

Language:

english

File:

PDF, 1.66 MB

english, 2011

19

GaAs Medipix2 hybrid pixel detector

Pasi Kostamo, Seppo Nenonen, Sami Vähänen, Lukas Tlustos, Christer Fröjdh, Michael Campbell, Yuri Zhilyaev, Harri Lipsanen

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

2008

Language:

english

File:

PDF, 344 KB

english, 2008

20

Patterning thick diffused junctions on CdTe

Juha Kalliopuska, Seppo Nenonen, Heikki Sipilä, Hans Andersson, Sami Vähänen, Simo Eränen, Lukas Tlustos

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

2009

Language:

english

File:

PDF, 583 KB

english, 2009

21

Modelling long term corrosion behaviour of copper canisters in KBS-3 repository

King, F, Kolar, M, Vähänen, M, Lilja, C

Journal:

Corrosion Engineering Science and Technology

Year:

2011

Language:

english

File:

PDF, 478 KB

english, 2011

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